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S-16BF-2M5P Precision double-sided plane polishing machine

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S-16BF-2M5P Precision double-sided plane polishing machine

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Product description

1. Product use

Double-sided high-precision polishing of metal, non-metal and other hard and brittle materials such as optical glass, ceramics, electronic materials, silicon wafers, germanium wafers, computer disk substrates, etc., especially suitable for silicon wafers below 5〃 (φ125mm) and the same size specifications Double-sided precision polishing of special-shaped parallel plane materials.

2. Main features

1. Precise pressure control: PLC+PT + low friction cylinder to achieve precise pressure control;

2. Hanging damping device: a flexible connection method for damping both static and dynamic;

3. Precision transmission system: high-precision full gear transmission, high-precision bearing support;

4. Lower plate support: high-precision structural bearing support to improve the accuracy and running stability of the equipment;

5. Maintenance-free: The key components adopt domestic brands, and the redundant design has a large safety factor;

6. ​​Forced heat dissipation system: adopts axial flow fan to exhaust heat, and reserves air extraction interface, users can connect by themselves

7. Convenient operation: low table top, semi-naked wet basin is easy to clean; the bottom plate has a pneumatic lifting function, which meets the requirements of picking and placing workpieces and adjusting the meshing position of the cruise ship

Three, technical parameters

No. Item Specifications

1 Lower throw tray size φ1155mm×φ348mm×50mm

Speed ​​3-60rpm

2 Top throw plate size φ1155mm×φ348mm×50mm

3 Upper and lower disk drive motor 15kW AC380V 50Hz 1460rpm (frequency conversion control)

4 Sun wheel drive motor 2.2kW AC380V 50Hz 1420rpm (frequency conversion control)

5 Cruising Star Wheel Parameters Inch: DP12 Z=200 α=20°

Quantity 5

6 Liquid supply device Stirring motor 120W, AC380V

Liquid supply pump 1/4HP with a volume of about 40L (double layer)

7 Accuracy index The end face run-out of the bottom throwing plate ≤0.05mm

Flatness of upper and lower throwing plate ≤0.02mm

8 Water source Pure water or tap water

9 Power supply 18.5kW AC380V 50Hz (total power)

10 Cable specifications Three-phase five-wire system. 3×6mm²+2×4mm²

11 Air source Compressed air source 0.5-0.6Mpa, interface φ10mm (outer diameter)

12 Dimensions: width x length x height: 1550mm×2000mm×2740mm

13 weight about 5500Kg

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The company is committed to the equipment sales business integrating equipment, technology and accessories.

Suzhou Bohongyuan Equipment Co., Ltd

Add:No.22, Aigehao Road, Weitang Town, Xiangcheng District, Suzhou


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