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9BF-1M5L Precision double-sided surface grinding machine/ 9BF-1M5P Precision double-sided plane polishing machine

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9BF-1M5L Precision double-sided surface grinding machine/ 9BF-1M5P Precision double-sided plane polishing machine

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Product description

1. Main purpose

This machine is mainly used for high-precision double-sided grinding and polishing of silicon wafers, optical glass, ceramic wafers, quartz crystals, semiconductors and other hard and brittle materials.

1. Pressure precision control: PLC+PT+precision decompression realizes pressure open loop control;

3. Precision transmission system: high-precision, small-backlash, all-gear transmission;

4. Lower plate support: high-precision flat fluid bearing support;

5. Pin-tooth drive internal and external gears adopt pin-tooth drive, which extends the service life of the carrier and is convenient for maintenance;

6. ​​Transmission system: Three motors are driven synchronously. The speed of the upper plate, the lower plate, the ring gear, and the sun gear (either forward or reverse) can be set at any speed. The county has a formula function

2. Technical parameters

No. Item Specifications

1 Upper and lower disk size Φ640mm×Φ235mm×30mm (grinding)

Φ640mm×Φ235mm×30mm (polished)

2 Cruising star wheel parameters Z=114, DP12, α=20

Quantity 5

3 Drive motor 4.0kW AC380V 50Hz 1460rpm (grinding)

5.5kW AC380V 50Hz 1460rpm (polished)

4 Lower plate speed 0~60rpm

5 Accuracy index Flatness of upper and lower plate ≤0.015mm

End jump of bottom plate ≤0.05mm

6 Processing range Maximum processing size Φ150mm

Minimum processing thickness 0.15mm (≤2" piece)

Carrying capacity of the whole disc 9×5=45 pieces (2" discs)

7 Water source

Pure water or tap water

8 Power Supply Power 5.0kW AC380V 50Hz (grinding)

6.5kW AC380V 50Hz (polished)

Cable specifications Three-phase five-wire scraping. 3×4mm²+2×2.5mm²

9 Air source pressure compressed air source 0.4-0.5Mpa

Takeover port diameter Φ10mm (outer diameter)

10 Dimensions

Width×Length×Height: 1040mm×1400mm×2360mm

11 weight

About 2200Kg

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The company is committed to the equipment sales business integrating equipment, technology and accessories.

Suzhou Bohongyuan Equipment Co., Ltd

Add:No.22, Aigehao Road, Weitang Town, Xiangcheng District, Suzhou


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