SP50-4DU Single side polishing machine
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18BF-4M9L Precision double-sided surface grinding machine/ 18BF-4M9P Precision double-sided plane polishing machine
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Product description
Parameters
1. Main purpose
It is mainly used for high-precision double-sided grinding and polishing of sapphire, blue glass, ceramic wafers, crystals, semiconductors and other hard and brittle materials.
2. Product features
1. Precise pressure control: PLC+PT+electric proportional valve+low friction cylinder to achieve high-precision pressure closed-loop control;
2. Hanging damping device: a shock-absorbing elastic connection method suitable for both static and dynamic;
3, the bottom plate support: high-precision plane fluid bearing support;
4. Pin gear transmission: The inner and outer gears adopt pin gear transmission, which extends the service life of the carrier and is convenient for maintenance;
5. Water cooling system for the upper and lower plates: the upper and lower plates adopt a water-cooled structure, and the temperature is controlled to achieve high pressure processing;
6, hanging pressure: maximum 1000kg;
7. Transmission system: Four motors are driven synchronously, the upper and lower discs, internal gears, external gears, (either forward or reverse) speed can be set arbitrarily, and the county has a formula function.
Three, technical parameters
| Number | Project | Specifications | ||
| 1 | Bottom plate | Size | Φ1252mm×Φ708mm×90mm(Grind) | |
| Φ12660mm×Φ700mm×90mm(polishing) | ||||
| Rotating speed | 5-70 rpm | |||
| Motor | 15kW AC380V 50Hz 1460rpm | |||
| 2 | Hanging | Size | Φ1252mm×Φ708mm×90mm(Grind) | |
| Φ1260mm×Φ700mm×90mm(polishing) | ||||
| Rotating speed | 3-40 rpm | |||
| Motor | 11kW AC380V 50Hz 1460rpm | |||
| 3 | Cruise ship | Parameter | Pitch:15.7 Z=64 | |
| Quantity | 9 | |||
| 4 | Sun gear | Rotating speed | 3-35 rpm | |
| Motor | 2.2kW AC380V 50Hz 1400rpm | |||
| 5 | Ring gear | Rotating speed | 3-35 rpm | |
| Motor | 4kW AC380V 50Hz 1400rpm | |||
| Lifting motor | 0.75kW AC380V 50Hz 1400rpm | |||
| Lifting stroke | 30mm | |||
| 6 | Accuracy index | Flatness of upper and lower plate | ≤0.02mm | |
| Bottom jump | ≤0.03mm | |||
| 7 | Processing range | Maximum processing size | Φ280mm | |
| Minimum processing thickness | 0.20mm(≤2"sheet) | |||
| Whole plate carrying capacity | 18×9=162片（2" Wafer） | |||
| 8 | Water source | Pure water or tap water | ||
| 9 | Power supply | Power | 34kW AC380V 50Hz | |
| Cable specifications | Three-phase five-wire scraping 3×10mm²+2×6mm² | |||
| 10 | Gas source | Pressure | Compressed air source0.5-0.6Mpa | |
| Take over caliber | InterfaceΦ10mm（Outer diameter） | |||
| 11 | Dimensions | Length × width × height:2100mm×1600mm×3013mm(With feet80) | ||
| 12 | weight | About7500Kg | ||
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The company is committed to the equipment sales business integrating equipment, technology and accessories.
Suzhou Bohongyuan Equipment Co., Ltd
Add：No.22, Aigehao Road, Weitang Town, Xiangcheng District, Suzhou
Tel：0512-65486261
Mail：bohong@szbhyjx.com
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