SL50-4DU Single-sided copper mill

1. Product use, scope of application and characteristics

This machine is mainly used for single-sided grinding of hard and brittle materials such as silicon carbide, silicon wafers, germanium wafers, lithium niobate, glass, etc. It can also be used for single-sided grinding of sapphire sheet materials, and for parallel planes of other hard and brittle materials. Single-sided high-precision and high-efficiency grinding.

The machine adopts touch interface and PLC control. Provide users with an open graphical control interface to give full play to the mechanical hardware performance; the main drive of the machine has the characteristics of short transmission chain, stability and reliability; four upper throwing heads actively rotate, pressure control adopts electric proportional valve for forced cooling, and precise temperature control .

2. Equipment transmission structure and layout

Ø The main shaft system is located under the equipment. The motor drives the worm gear reducer through a narrow V-belt. The reducer is directly connected to the shaft to ensure its running accuracy. The bottom plate is positioned and supported by cross roller bearings, and the running rigidity and accuracy are obtained. In order to ensure a good guarantee, the lower part of the bottom plate shaft is equipped with a rotary joint, which is used to pass cooling water into the throw plate;

Ø The upper polishing system head is located in the upper part of the equipment. The lifting and pressurizing of the upper polishing head is realized by a cylinder. The upper plate is provided with a cooling water channel for cooling the upper polishing head. The rotation of the upper polishing head is directly driven by a geared motor through a gear;

Ø There is a middle guide wheel device that can be raised and lowered in the middle of the lower throwing plate, and four outer guide wheel devices are arranged at the edge of the liquid receiving basin, and the two can cooperate to realize the automatic positioning of the workpiece plate;

Ø There is a main operation panel on the front of the upper beam of the equipment, which can perform parameter setting, operation monitoring and other functions. There are two small control panels on each side of the beam for the lifting operations of the four upper throwing heads;

Ø A liquid system is installed on the rear box of the equipment, with passages for cooling water, polishing liquid, and cleaning water for the upper and lower plates;

Ø Front uprights are installed on both sides of the front box and crossbeam of the equipment for auxiliary support of the crossbeam. The height direction of the uprights can be adjusted slightly;

Ø There are two oil filling ports on the right side of the box, which are used for lubricating the two sets of bearings of the main shaft;

Ø An infrared temperature measuring device is installed on the beam to monitor the surface temperature of the throwing plate;

Ø A slidable protective cover is provided on the outside of the lower throwing plate to prevent the splashing of working fluid and reduce the overflow of harmful gases;

Ø The working fluid adopts the diamond fluid spray method

Ø Equipped with a turning tool device, which can perform surface modification and groove processing on the surface of the copper disc.