SP50-4DU Single side polishing machine
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13BF-3M6L Precision double-sided surface grinding machine /13BF-3M6P Precision double-sided plane polishing machine
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Product description
Parameters
1. Main purpose
is mainly used for high-precision double-sided grinding/polishing of sapphire, blue glass, ceramic wafers, crystals, semiconductors and other hard and brittle materials, especially for the processing of ultra-thin workpieces.
2. Product features
1. Precise pressure control: PLC+PT+electric proportional valve+low friction cylinder to achieve high-precision pressure closed-loop control;
2, upper plate shock absorption device: a vibration reduction elastic connection method suitable for both static and dynamic;
3. Precision transmission system: high-precision, small-backlash, all-gear transmission;
4. Lower plate support: high-precision flat fluid bearing support;
5. Pin gear transmission: The inner and outer gears adopt pin gear transmission, which extends the service life of the carrier and is convenient for maintenance;
6. Transmission system: Three motors are driven synchronously. The speed of the upper plate, the lower plate, the ring gear, and the sun gear (either forward or reverse) can be set arbitrarily, and it has a formula function.
Three, technical parameters
No. Item Specifications
1 Lower plate size Φ952mm×Φ388mm×50mm (grinding)
Φ960mm×Φ380mm×50mm (polished)
Speed 3-45 rpm
Drive motor 7.5kW AC380V 50Hz 1440rpm
2 Upper plate size Φ952mm×Φ388mm×50mm (grinding)
Φ960mm×Φ380mm×50mm (polished)
Speed 3-30 rpm
Drive motor 4.0kW AC380V 50Hz 1440rpm
3 Cruising star wheel parameters Pitch: 15.7 Z=64
Quantity 6
4 Sun wheel speed 0-20 rpm
Drive motor 1.5kW AC380V 50Hz 1440rpm
5 Accuracy index Flatness of upper and lower plate ≤0.015mm
End jump of bottom plate ≤0.02mm
6 Processing range Maximum processing size Φ280mm
Minimum processing thickness 0.15mm (≤2" piece)
Carrying capacity of the whole disc 18×6=108 pieces (2" discs)
7 Water source
Pure water or tap water
8 Power supply Power 14kW AC380V 50Hz
Cable specifications Three-phase five-wire scraping. 3×4mm²+2×2.5mm²
9 Air source pressure compressed air source 0.5-0.6Mpa
Takeover port diameter Φ10mm (outer diameter)
10 Dimensions
Length×width×height: 1650mm×1300mm×2500mm
11 weight
About 3000Kg
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The company is committed to the equipment sales business integrating equipment, technology and accessories.
Suzhou Bohongyuan Equipment Co., Ltd
Add：No.22, Aigehao Road, Weitang Town, Xiangcheng District, Suzhou
Tel：0512-65486261
Mail：bohong@szbhyjx.com
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