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18BF-4M9L Precision double-sided surface grinding machine/ 18BF-4M9P Precision double-sided plane polishing machine

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18BF-4M9L Precision double-sided surface grinding machine/ 18BF-4M9P Precision double-sided plane polishing machine

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Product description

1. Main purpose

It is mainly used for high-precision double-sided grinding and polishing of sapphire, blue glass, ceramic wafers, crystals, semiconductors and other hard and brittle materials.

2. Product features

1. Precise pressure control: PLC+PT+electric proportional valve+low friction cylinder to achieve high-precision pressure closed-loop control;

2. Hanging damping device: a shock-absorbing elastic connection method suitable for both static and dynamic;

3, the bottom plate support: high-precision plane fluid bearing support;

4. Pin gear transmission: The inner and outer gears adopt pin gear transmission, which extends the service life of the carrier and is convenient for maintenance;

5. Water cooling system for the upper and lower plates: the upper and lower plates adopt a water-cooled structure, and the temperature is controlled to achieve high pressure processing;

6, hanging pressure: maximum 1000kg;

7. Transmission system: Four motors are driven synchronously, the upper and lower discs, internal gears, external gears, (either forward or reverse) speed can be set arbitrarily, and the county has a formula function.

Three, technical parameters

Number Project Specifications
1 Bottom plate Size Φ1252mm×Φ708mm×90mm(Grind)
Rotating speed 5-70 rpm
Motor 15kW AC380V 50Hz 1460rpm
2 Hanging Size Φ1252mm×Φ708mm×90mm(Grind)
Rotating speed 3-40 rpm
Motor 11kW AC380V 50Hz 1460rpm
3 Cruise ship Parameter Pitch:15.7 Z=64
Quantity 9
4 Sun gear Rotating speed 3-35 rpm
Motor 2.2kW AC380V 50Hz 1400rpm
5 Ring gear Rotating speed 3-35 rpm
Motor 4kW AC380V 50Hz 1400rpm
Lifting motor 0.75kW AC380V 50Hz 1400rpm
Lifting stroke 30mm
6 Accuracy index Flatness of upper and lower plate ≤0.02mm
Bottom jump ≤0.03mm
7 Processing range Maximum processing size Φ280mm
Minimum processing thickness 0.20mm(≤2"sheet)
Whole plate carrying capacity 18×9=162片(2" Wafer)
8 Water source   Pure water or tap water
9 Power supply Power 34kW AC380V 50Hz
Cable specifications Three-phase five-wire scraping 3×10mm²+2×6mm²
10 Gas source Pressure Compressed air source0.5-0.6Mpa
Take over caliber InterfaceΦ10mm(Outer diameter)
11 Dimensions   Length × width × height:2100mm×1600mm×3013mm(With feet80)
12 weight   About7500Kg


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Suzhou Bohongyuan Equipment Co., Ltd

Add:No.22, Aigehao Road, Weitang Town, Xiangcheng District, Suzhou


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